Alright been a lot of posts about this. I did this a few hours ago today. Go to Pepboys (or any auto retail store) and buy a can of "CRC Lectro-Motive Electrical Cleaner". Comes in a big red bottle. It will tell you on the back of the bottle that it's okay for wires, alternators, starters, solenoids, etc.

Buy it. Take your MAF off completely. Put the nozzle on the bottle if you'd like (comes with it) and spray into the MAF. Gently. You'll be spraying two different sections and 3 wires. Don't hose it. Don't worry. Leaves no residue and dries quickly when you blow on it. That's it. Put MAF back in and you're done.

 

Another method that worked for me today-I removed the actual sensor from the maf body (need security Torx screw tips for this), sprayed it with Gunk engine cleaner (mine had engine oil all over it) and gently "scrubbed" the sensor components with a small paint brush. Washed off with water and reinstalled it. Workes great now-no rough idle.